主要应用于半导体器件、金属陶瓷、可控硅器件、玻璃封装器件以及各种厚膜电路的烧结和焊接、排腊、烘等工艺。还可应用于金属壳体在N2、H2及氨分解气气氛条件下的高温钎焊、烧结、退火等高温热处理工艺。

       It is mainly applied in processes such as sintering, welding, dewaxing, and drying of semiconductor devices, cermets, thyristor devices, glass-encapsulated devices, and various thick-film circuits. It can also be used in high-temperature heat treatment processes of metal shells, including high-temperature brazing, sintering, and annealing, under the atmosphere conditions of N₂ (nitrogen), H₂ (hydrogen), and ammonia decomposition gas.

设备主要特点

◆ 具有连续工作性，保证生产效率高

◆ 炉体可靠密封，防止炉内气氛外泄，保证设备环境安全

◆ 独特的气帘设计，确保炉外空气与炉内氢气隔绝，具备高度安全性

Features of equipments

◆ It features continuous operability, ensuring high production efficiency.

◆ The furnace body is reliably sealed to prevent the leakage of the atmosphere inside the furnace and ensure the safety of the equipment environment.

◆ Unique air curtain design ensures isolation between outside air and internal hydrogen of the furnace, providing high safety.

主要技术指标

◆  传动方式：网带式、链式、底辊式、推板式

◆  加热方式：内热式、外热式

◆  炉芯管：背弓式、直通式

◆  加热区个数：根据客户需要多段加热，满足工艺曲线要求（≥10个）

◆  冷却区个数：≥3个

◆  最高温度：根据处理材料和工艺而定（≥300℃）

◆  温度精度：±1℃

◆  加热控制：温控仪自动控制

◆  横向温差：≤±1℃

◆  氧含量控制：30PPM以内（耗氮量≤45m³/H）

◆  氧含量采样检测位置：依需求设计检测点、位置（≥1点）

◆  洁净度：设计、制作达到万级净化标准

◆  可根据客户需要配置工件托架（推板等）自动退回系统两端设有气幕和机械幕帘

Key parameters

◆  Drive Modes:：Mesh Belt 、Chain、Bottom Roller、Push Plate

◆  Heating Methods:Internal Heating、External Heating

◆  Furnace Core Tubes:Back-Arched 、Straight-Through

◆  Number of Heating Zones：Multi-zone heating is available according to customer requirements to meet the process curve specifications (≥ 10 zones).

◆  Number of Cooling Zones：≥ 3 zones

◆  Maximum Temperature：Depends on the processed materials and processes (≥ 300℃)

◆  Temperature Accuracy:：±1℃

◆  Heating Control：Automatic control via temperature controller

◆  Lateral Temperature Difference：≤ ±1℃

◆  Oxygen Content Control：Within 30 PPM (Nitrogen Consumption ≤ 45 m³/H)

◆  Oxygen Content Sampling and Detection Positions：Detection points and positions are designed according to requirements (≥ 1 point)

◆  Cleanliness Level：The design and manufacturing meet the Class 10,000 cleanroom standard

◆  An automatic return system for workpiece carriers (such as push plates) can be configured according to customer needs. Both ends are equipped with air curtains and mechanical curtains.