设备主要特点

◆ 串级控温系统，恒温区高精度

◆ 具有高抗干扰能力

◆ 具有多种工艺管路，可供用户随意灵活配置

◆ 支持SECS/GEM通讯

主要技术指标

◆ 可配工艺管数量: 1~4管/台

◆ 工作温度范围: 200~800℃

◆ 恒温区长度: 300~1100mm

◆ 单点温度稳定性: ±1℃/24h

◆ 最大可控升温速度: 15℃/min

◆ 最大降温速度: 3℃/min

Features of equipments

◆ Cascade temperature control system, high precision in constant temperature zone

◆ High anti-interference ability

◆ Multiple processing pipeline available for flexibleconfiguration;

◆ Supporting SECS/GEM Communication.

Key parameters

◆ Quantity of process tube: 1-4 tubes/set;

◆ Working temperature range: 200~800℃

◆ Length of constant temp. zone: 300~1100mm

◆ Single point temperature stability: ±1℃/24h

◆ Max heating rate: 15℃/min;

◆ Max cooling rate: 3℃/min