设备主要特点

◆ 工艺曲线的自动运行控制功能

◆ 智能升降温斜率控制功能

◆ 可存储多组PID参数供系统运行调用功能

◆ 系统故障的检测与报警功能

◆ 系统误差修正(单点或多点动态修正功能)

◆ 停电后断点继续运行功能

◆ 该系统可根据用户的特殊要求增减或开发相应的功能

◆ 支持SECS/GEM通讯

主要技术指标

◆ 可配工艺管数量: 1~4管/台

◆ 工作温度范围: 200~800℃

◆ 恒温区长度: 300~1100mm

◆ 单点温度稳定性: ±0.5℃/24h

◆ 最大可控升温速度: 15℃/min

Features of equipments

◆ Automatic control operation for processing recipe

◆ Smart heating and cooling ramp control

◆ Storing multiple groups of PID parameters

◆ System malfunction detection alarm

◆ System tolerance calibration(single or multiple point dynamic calibration)

◆ Resume running at break point after power-off

◆ This system can be adjusted or developed according to the special requirements of customers.

◆ Supporting SECS/GEM Communication.

Key parameters

◆ Quantity of process tube: 1-4 tubes/set

◆ Working temperature range: 200~800℃;

◆ Length of constant temp zone: 300~1100mm

◆ Single point temperature stability: ±1℃/24h;

◆ Max heating rate: 15℃/min;